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  • Composed of roots pump and foreline pump
  • 或以上 Vacuum rate: 28L / S or above
  • 控制单元 Mitsubishi touch screen, PLC control unit
  • 或LEYBOLD真空传感器 INFICON or LEYBOLD vacuum sensor
  • Real-time display of current vacuum on touch screen
  • Vacuum pump automatic start-stop and overload protector
  • Automatically start timing when connected to the workpiece, automatically determine whether the vacuum degree is qualified within the set time
  • Reserved communication interface for data connection with the line body